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中文
脉冲磁控溅射低温沉积Au薄膜的微观结构和内应力研究
纪建超, 颜悦, 哈恩华
Electeoplating and Finishing . 2025, (
06
): 56 -62 . DOI: 10.19289/j.1004-227x.2025.06.009
