脉冲磁控溅射低温沉积Au薄膜的微观结构和内应力研究

脉冲磁控溅射低温沉积Au薄膜的微观结构和内应力研究

Electeoplating and Finishing ›› 2025, Vol. 44 ›› Issue (06) : 56-62. DOI: 10.19289/j.1004-227x.2025.06.009

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