杂质对硅晶体生长影响的分子动力学模拟研究

杂质对硅晶体生长影响的分子动力学模拟研究

Information Recording Materials ›› 2025, Vol. 26 ›› Issue (03) : 36-38. DOI: 10.16009/j.cnki.cn13-1295/tq.2025.03.008

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