用于碳化硅晶体生长的多孔碳化钽材料制造理论研究

用于碳化硅晶体生长的多孔碳化钽材料制造理论研究

Information Recording Materials ›› 2025, Vol. 26 ›› Issue (01) : 1-5. DOI: 10.16009/j.cnki.cn13-1295/tq.2025.01.074

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TQ135.13 / O782 / TQ163.4

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