工艺参数、退火温度对钽氮化物薄膜生长速率、相结构及电学性能的影响

工艺参数、退火温度对钽氮化物薄膜生长速率、相结构及电学性能的影响

Journal of Guilin University of Electronic Technology ›› 2023, Vol. 43 ›› Issue (06) : 486-492. DOI: 10.16725/j.cnki.cn45-1351/tn.2023.06.010

Author information +

History +

CLC number

TB383.2

Cite this article

Download Citations

Comments

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉