蓝宝石衬底上AlGaN/GaN异质结的制备及性能研究

蓝宝石衬底上AlGaN/GaN异质结的制备及性能研究

Journal of Guilin University of Electronic Technology ›› 2022, Vol. 42 ›› Issue (01) : 8-13. DOI: 10.16725/j.cnki.cn45-1351/tn.2022.01.001

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