两种不同形式原料粉体制备的ITO靶材特性的比较研究

两种不同形式原料粉体制备的ITO靶材特性的比较研究

Journal of Guilin University of Electronic Technology ›› 2024, Vol. 44 ›› Issue (05) : 511-518. DOI: 10.16725/j.1673-808X.2023111

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