GaAs基底上制备圆孔阵列光栅及其影响因素研究

GaAs基底上制备圆孔阵列光栅及其影响因素研究

Journal of Guilin University of Electronic Technology ›› 2024, Vol. 44 ›› Issue (03) : 323-330. DOI: 10.16725/j.1673-808X.2021350

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