±16g三质量块三轴MEMS电容式加速度计的设计
虎勇, 李绍荣, 郭威, 蒋婷, 郭小伟, 邹力, 任颖慧, 梁杰
J Univ Electr Sci Technol Chin . 2023, (03): 444 -450 . 

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