硅和碳化硅MOSFET中PN结SEM图像掺杂衬度分析

硅和碳化硅MOSFET中PN结SEM图像掺杂衬度分析

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PDF(982 KB)

J Univ Electr Sci Technol Chin ›› 2025, Vol. 54 ›› Issue (03) : 347-352.

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