MEMS压阻式压力传感器梁-膜-三岛膜结构设计与优化

MEMS压阻式压力传感器梁-膜-三岛膜结构设计与优化

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PDF(1218 KB)

J Univ Electr Sci Technol Chin ›› 2024, Vol. 53 ›› Issue (06) : 852-861.

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