自成形硅表面微结构：表面特征及潜在应用（英文）

自成形硅表面微结构：表面特征及潜在应用（英文）

J Univ Electr Sci Technol Chin ›› 2024, Vol. 53 ›› Issue (02) : 180-184.

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PDF(5862 KB)

J Univ Electr Sci Technol Chin ›› 2024, Vol. 53 ›› Issue (02) : 180-184.

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